Jin Hyeok Kim Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Jin Hyeok Kim returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|Preparation of TiN films by plasma assisted atomic layer deposition for copper metallization
|Characteristics of Tungsten Carbide Films Prepared by Plasma-Assisted ALD Using Bis(tert-butylimido)bis(dimethylamido)tungsten