Bodo Kalkofen Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Bodo Kalkofen returned 6 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Boosting n-Type Doping Levels of Ge With Co-Doping by Integrating Plasma-Assisted Atomic Layer Deposition and Flash Annealing Process
2Diffusion of Phosphorus and Boron from Atomic Layer Deposition Oxides into Silicon
3Ag films grown by remote plasma enhanced atomic layer deposition on different substrates
4Plasma-assisted atomic layer deposition of germanium antimony tellurium compounds
5Use of B2O3 films grown by plasma-assisted atomic layer deposition for shallow boron doping in silicon
6Atomic Layer Deposition of the Conductive Delafossite PtCoO2