Bodo Kalkofen Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Bodo Kalkofen returned 6 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Use of B2O3 films grown by plasma-assisted atomic layer deposition for shallow boron doping in silicon
2Boosting n-Type Doping Levels of Ge With Co-Doping by Integrating Plasma-Assisted Atomic Layer Deposition and Flash Annealing Process
3Atomic Layer Deposition of the Conductive Delafossite PtCoO2
4Diffusion of Phosphorus and Boron from Atomic Layer Deposition Oxides into Silicon
5Plasma-assisted atomic layer deposition of germanium antimony tellurium compounds
6Ag films grown by remote plasma enhanced atomic layer deposition on different substrates