Gi-hee Cho Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Gi-hee Cho returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Plasma Enhanced Atomic Layer Deposition of TiCxNy Film with Various Reactive Gases|
|2||Plasma-Enhanced Atomic Layer Deposition of TaCxNy Films with tert-Butylimido Tris-diethylamido Tantalum and Methane-Hydrogen Gas|