Introducing Plasma ALD, LLC's first in-house product.

An economical, compact inductively coupled plasma source.

Ideal for:
  • Plasma-Enhanced Atomic Layer Deposition
  • Thin Film Etch
  • Surface cleaning
  • Surface modification

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Peter Schaaf Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Peter Schaaf returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
13D structure evolution using metastable atomic layer deposition based on planar silver templates
2Tuning the nanoscale morphology and optical properties of porous gold nanoparticles by surface passivation and annealing