Sebastian Killge Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Sebastian Killge returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1In vacuo investigations on the nucleation of TaCN by plasma enhanced atomic layer deposition
2High-aspect-ratio TSVs with thALD/PEALD tantalum-based barrier layer, thALD Ruthenium seed layer and subsequent copper electroplating
3In vacuo studies on plasma-enhanced atomic layer deposition of cobalt thin films