Kai-Erik Elers Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Kai-Erik Elers returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
Number | Title |
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1 | Film Uniformity in Atomic Layer Deposition |
2 | TiCl4 as a Precursor in the TiN Deposition by ALD and PEALD |