Kai-Erik Elers Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Kai-Erik Elers returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1TiCl4 as a Precursor in the TiN Deposition by ALD and PEALD


Shortcuts



© 2014-2018 plasma-ald.com