Toshiki Nakano Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Toshiki Nakano returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
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1 | Enhanced interfacial reaction of precursor and low temperature substrate in HfO2 atomic layer deposition with highly Ar diluted O2 plasma |