Se-Hun Kwon Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Se-Hun Kwon returned 11 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Electrical and Corrosion Properties of Titanium Aluminum Nitride Thin Films Prepared by Plasma-Enhanced Atomic Layer Deposition
2Improved Oxygen Diffusion Barrier Properties of Ruthenium-Titanium Nitride Thin Films Prepared by Plasma-Enhanced Atomic Layer Deposition
3Improvement of Copper Diffusion Barrier Properties of Tantalum Nitride Films by Incorporating Ruthenium Using PEALD
4Improvement of Morphological Stability of PEALD-Iridium Thin Films by Adopting Two-Step Annealing Process
5Initial Stages of Ruthenium Film Growth in Plasma-Enhanced Atomic Layer Deposition
6PEALD of a Ruthenium Adhesion Layer for Copper Interconnects
7Plasma-Enhanced Atomic Layer Deposition of Ru-TiN Thin Films for Copper Diffusion Barrier Metals
8Plasma-Enhanced Atomic Layer Deposition of Ruthenium Thin Films
9Plasma-enhanced atomic layer deposition of SnO2 thin films using SnCl4 and O2 plasma
10Plasma-enhanced atomic layer deposition of tantalum nitride thin films using tertiary-amylimido-tris(dimethylamido)tantalum and hydrogen plasma
11Sub-0.5 nm Equivalent Oxide Thickness Scaling for Si-Doped Zr1-xHfxO2 Thin Film without Using Noble Metal Electrode