Jae Kyoung Mun Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Jae Kyoung Mun returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | Improved stability of electrical properties of nitrogen-added Al2O3 films grown by PEALD as gate dielectric |