Hyung-Sang Park Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Hyung-Sang Park returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Low temperature plasma-enhanced ALD enables cost-effective spacer defined double patterning (SDDP)|
|2||Plasma-Enhanced Atomic Layer Deposition of Ta-N Thin Films|