Takahiro Imai Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Takahiro Imai returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Room-temperature atomic layer deposition of ZrO2 using tetrakis(ethylmethylamino)zirconium and plasma-excited humidified argon
2Room-temperature plasma enhanced atomic layer deposition of aluminum silicate and its application in dye-sensitized solar cells
3RT Atomic Layer Deposition of ZrO2 By Using Plasma Excited Water Vapor