C. Lavoie Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by C. Lavoie returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1The physical properties of cubic plasma-enhanced atomic layer deposition TaN films
2The Growth of Tantalum Thin Films by Plasma-Enhanced Atomic Layer Deposition and Diffusion Barrier Properties
3Diffusion barrier properties of transition metal thin films grown by plasma-enhanced atomic-layer deposition