Kye-Sun Park Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Kye-Sun Park returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
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1 | Formation of Nano-Crystalline Ru-Based Ternary Thin Films by Plasma-Enhanced Atomic Layer Deposition |