Do Youl Kim Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Do Youl Kim returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Remote Plasma-Enhanced Atomic-Layer Deposition of TiN by Using TDMAT with a NH3 Plasma
2Remote plasma enhanced atomic layer deposition of TiN thin films using metalorganic precursor
3Characteristics and Compositional Variation of TiN Films Deposited by Remote PEALD on Contact Holes