Fatemeh S. M. Hashemi Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Fatemeh S. M. Hashemi returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Aluminum tri-isopropoxide as an alternative precursor for atomic layer deposition of aluminum oxide thin films