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The publication database currently has 1559 entries.
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192 Films Compositions
265 Precursors and Plasma Gases
75 Deposition Hardwares
241 Film and Plasma Characteristics
83 Theses

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Recent Database Additions
Improved dielectric properties of BeO thin films grown by plasma enhanced atomic layer deposition Aluminum tri-isopropoxide as an alternative precursor for atomic layer deposition of aluminum oxide thin films Plasma-enhanced atomic layer deposition of hafnium silicate thin films using a single source precursor
Search 1559 plasma ALD publications by:
192 Films Compositions
265 Precursors and Plasma Gases
75 Deposition Hardwares
241 Film and Plasma Characteristics

Xinhong Cheng Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Xinhong Cheng returned 7 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Effects of rapid thermal annealing on the properties of AlN films deposited by PEALD on AlGaN/GaN heterostructures
2Interface engineering of an AlNO/AlGaN/GaN MIS diode induced by PEALD alternate insertion of AlN in Al2O3
3Low-temperature plasma-enhanced atomic layer deposition of HfO2/Al2O3 nanolaminate structure on Si
4Negative differential resistance in the I-V curves of Al2O3/AlGaN/GaN MIS structures
5Properties of HfAlO film deposited by plasma enhanced atomic layer deposition
6Properties of HfLaO MOS capacitor deposited on SOI with plasma enhanced atomic layer deposition
7Semiconductor-like nanofilms assembled with AlN and TiN laminations for nearly ideal graphene-based heterojunction devices

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Top Authors
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