K.-Y. Chu Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by K.-Y. Chu returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Ferroelectricity of HfZrO2 in Energy Landscape With Surface Potential Gain for Low-Power Steep-Slope Transistors|