Your search for plasma enhanced atomic layer deposition publications authored by Manca Logar returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Approaching the limits of dielectric breakdown for SiO2 films deposited by plasma-enhanced atomic layer deposition|
|2||Enhanced Step Coverage of TiO2 Deposited on High Aspect Ratio Surfaces by Plasma-Enhanced Atomic Layer Deposition|
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