K. Sasaki Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by K. Sasaki returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Electron channel mobility in silicon-doped Ga2O3 MOSFETs with a resistive buffer layer
2Field-Plated Ga2O3 MOSFETs With a Breakdown Voltage of Over 750 V
3Ga2O3 MOSFETs Using Spin-On-Glass Source/Drain Doping Technology