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Daniel C. Messina Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Daniel C. Messina returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Plasma enhanced atomic layer deposition and atomic layer etching of gallium oxide using trimethylgallium
2Comparison of AlF3 thin films grown by thermal and plasma enhanced atomic layer deposition