
S. Mack Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by S. Mack returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
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1 | Performance enhancement of InAsSb QW-MOSFETs with in-situ H2 plasma cleaning for gate stack formation |