Sven Van den Berghe Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Sven Van den Berghe returned 7 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Ru thin film grown on TaN by plasma enhanced atomic layer deposition
2Comparison of Thermal and Plasma-Enhanced ALD/CVD of Vanadium Pentoxide
3Atomic layer deposition of titanium nitride from TDMAT precursor
4Growth Kinetics and Crystallization Behavior of TiO2 Films Prepared by Plasma Enhanced Atomic Layer Deposition
5Diffusion barrier properties of TaNx films prepared by plasma enhanced atomic layer deposition from PDMAT with N2 or NH3 plasma
6Controllable nitrogen doping in as deposited TiO2 film and its effect on post deposition annealing
7Texture of atomic layer deposited ruthenium