About Plasma ALD, LLC

The Plasma Enhanced Atomic Layer Deposition Publication Database is developed and maintained by Plasma ALD, LLC, a developer and supplier of inductively coupled plasma (ICP) sources for plasma-enhanced atomic layer deposition (PEALD), atomic layer etch (ALE), thin-film etching, surface cleaning, surface modification, and research plasma systems.

Our ICP sources are designed for integration with existing ALD and vacuum-processing equipment. Plasma ALD also provides plasma-source integration, process-development, and troubleshooting assistance based on decades of experience with low-pressure plasma processing and PEALD systems.

Researchers, universities, equipment manufacturers, and laboratories looking for an ICP plasma source or assistance adding plasma capability to a vacuum system can learn more on our Plasma Sources page.

Mervi Paulasto-Kröckel Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Mervi Paulasto-Kröckel returned 3 record(s).

NumberTitle
1Structural and chemical analysis of annealed plasma-enhanced atomic layer deposition aluminum nitride films
2Blistering mechanisms of atomic-layer-deposited AlN and Al2O3 films
3Atomic layer deposition of AlN from AlCl3 using NH3 and Ar/NH3 plasma