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An economical, compact inductively coupled plasma source.

Ideal for:
  • Plasma-Enhanced Atomic Layer Deposition
  • Thin Film Etch
  • Surface cleaning
  • Surface modification

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Mervi Paulasto-Kröckel Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Mervi Paulasto-Kröckel returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Structural and chemical analysis of annealed plasma-enhanced atomic layer deposition aluminum nitride films
2Blistering mechanisms of atomic-layer-deposited AlN and Al2O3 films
3Atomic layer deposition of AlN from AlCl3 using NH3 and Ar/NH3 plasma