Mervi Paulasto-Kröckel Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Mervi Paulasto-Kröckel returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Structural and chemical analysis of annealed plasma-enhanced atomic layer deposition aluminum nitride films
2Atomic layer deposition of AlN from AlCl3 using NH3 and Ar/NH3 plasma
3Blistering mechanisms of atomic-layer-deposited AlN and Al2O3 films