Your search for plasma enhanced atomic layer deposition publications authored by Toh-Ming Lu returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Direct Plating of Cu on Pd Plasma Enhanced Atomic Layer Deposition Coated TaN Barrier|
|2||Inductively Coupled Hydrogen Plasma-Assisted Cu ALD on Metallic and Dielectric Surfaces|
|3||Plasma-Assisted Atomic Layer Deposition of Palladium|
|4||Plasma-enhanced atomic layer deposition of palladium on a polymer substrate|
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