Toh-Ming Lu Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Toh-Ming Lu returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Inductively Coupled Hydrogen Plasma-Assisted Cu ALD on Metallic and Dielectric Surfaces
2Plasma-Assisted Atomic Layer Deposition of Palladium
3Plasma-enhanced atomic layer deposition of palladium on a polymer substrate


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