Toh-Ming Lu Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Toh-Ming Lu returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Inductively Coupled Hydrogen Plasma-Assisted Cu ALD on Metallic and Dielectric Surfaces
2Plasma-Assisted Atomic Layer Deposition of Palladium
3Direct Plating of Cu on Pd Plasma Enhanced Atomic Layer Deposition Coated TaN Barrier
4Plasma-enhanced atomic layer deposition of palladium on a polymer substrate