Masaaki Matsukuma Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Masaaki Matsukuma returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Atomic layer epitaxy of Si using atomic H
2Surface oxidation model in plasma enhanced atomic layer deposition for silicon oxide films including various aminosilane precursors