Your search for plasma enhanced atomic layer deposition publications authored by Thomas G. Allen returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Demonstration of c-Si Solar Cells With Gallium Oxide Surface Passivation and Laser-Doped Gallium p+ Regions|
|2||Plasma enhanced atomic layer deposition of gallium oxide on crystalline silicon: demonstration of surface passivation and negative interfacial charge|
|3||Silicon Surface Passivation by Gallium Oxide Capped With Silicon Nitride|
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