Ravi Kanjolia Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Ravi Kanjolia returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Experimental and theoretical determination of the role of ions in atomic layer annealing|
|2||Plasma-Enabled ALD of Niobium Nitride Using an Organometallic Nb Precursor|