Sung-Wook Kim Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Sung-Wook Kim returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Improvement of Copper Diffusion Barrier Properties of Tantalum Nitride Films by Incorporating Ruthenium Using PEALD|
|2||Improvement of Morphological Stability of PEALD-Iridium Thin Films by Adopting Two-Step Annealing Process|