Masayuki Saito Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Masayuki Saito returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
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1 | Atomic Layer Deposition of Ru Thin Films Using a New Beta-Diketonate Ru Precursor and NH3 Plasma as a Reactant |