Kentaro Shibahara Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Kentaro Shibahara returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Atomic layer controlled deposition of silicon nitride and in situ growth observation by infrared reflection absorption spectroscopy
2Atomic layer controlled deposition of silicon nitride with self-limiting mechanism