Kentaro Shibahara Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Kentaro Shibahara returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|Atomic layer controlled deposition of silicon nitride and in situ growth observation by infrared reflection absorption spectroscopy
|Atomic layer controlled deposition of silicon nitride with self-limiting mechanism