Kentaro Shibahara Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Kentaro Shibahara returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Atomic layer controlled deposition of silicon nitride with self-limiting mechanism
2Atomic layer controlled deposition of silicon nitride and in situ growth observation by infrared reflection absorption spectroscopy