C. Chou Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by C. Chou returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
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1 | Low-Leakage Tetragonal ZrO2 (EOT < 1 nm) With In Situ Plasma Interfacial Passivation on Germanium |