Stephan Ratzsch Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Stephan Ratzsch returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Inhibition of Crystal Growth during Plasma Enhanced Atomic Layer Deposition by Applying BIAS
2Influence of the oxygen plasma parameters on the atomic layer deposition of titanium dioxide
3High-efficiency embedded transmission grating