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The publication database currently has 1567 entries.

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In vacuo investigations on the nucleation of TaCN by plasma enhanced atomic layer deposition In vacuo studies on plasma-enhanced atomic layer deposition of cobalt thin films Influence of oxygen source on the ferroelectric properties of ALD grown Hf_1-xZr_xO₂ films

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265 Precursors and Plasma Gases

76 Deposition Hardwares

242 Film and Plasma Characteristics

Brianna S. Eller Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Brianna S. Eller returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

Number	Title
1	Characterization of plasma-enhanced atomic layer deposition of Al₂O₃ using dimethylaluminum isopropoxide