Brianna S. Eller Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Brianna S. Eller returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Comparison of AlF3 thin films grown by thermal and plasma enhanced atomic layer deposition
2Characterization of plasma-enhanced atomic layer deposition of Al2O3 using dimethylaluminum isopropoxide