Yingjie Chai Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Yingjie Chai returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1HfO2/SiO2 anti-reflection films for UV lasers via plasma-enhanced atomic layer deposition