Saima Ali Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Saima Ali returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | Thermal and plasma enhanced atomic layer deposition of SiO2 using commercial silicon precursors |
| 2 | Thermomechanical properties of aluminum oxide thin films made by atomic layer deposition |