Junsung Lee Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Junsung Lee returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1A study on film thickness control of vertical flow showerhead reactor for RF plasma deposition


Shortcuts



© 2014-2019 plasma-ald.com