Lin Chen Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Lin Chen returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Direct Growth of Al2O3 on Black Phosphorus by Plasma-Enhanced Atomic Layer Deposition
2Optical properties and bandgap evolution of ALD HfSiOx films
3Plasma enhanced atomic layer deposited platinum thin film on Si substrate with TMA pretreatment
4Resistive switching properties of plasma enhanced-ALD La2O3 for novel nonvolatile memory application