Lin Chen Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Lin Chen returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Optical properties and bandgap evolution of ALD HfSiOx films
2Direct Growth of Al2O3 on Black Phosphorus by Plasma-Enhanced Atomic Layer Deposition
3Resistive switching properties of plasma enhanced-ALD La2O3 for novel nonvolatile memory application
4Plasma enhanced atomic layer deposited platinum thin film on Si substrate with TMA pretreatment