Publication Information

Title:
Direct Growth of Al2O3 on Black Phosphorus by Plasma-Enhanced Atomic Layer Deposition
Type:
Journal
Info:
Nanoscale Research Letters (2017) 12:282
Date:
2017-03-20

Author Information

Name Institution
B. B. WuJiangnan University
H. M. ZhengFudan University
Y. Q. DingJiangnan University
Wen-Jun LiuFudan University
Hong Liang LuFudan University
Peng ZhouFudan University
Lin ChenFudan University
Qing-Qing SunFudan University
Shi-Jin DingFudan University
David Wei ZhangFudan University

Films

Plasma Al2O3


Film/Plasma Properties

Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy

Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy

Substrates

Black Phosphorus
Phosphorus

Keywords

Notes

999