P. S. Waggoner Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by P. S. Waggoner returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | Atomic layer deposited silicon dioxide films on nanomechanical silicon nitride resonators |