Marco Diegel Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Marco Diegel returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Wafer-level uniformity of atomic-layer-deposited niobium nitride thin films for quantum devices
2Structural and electrical properties of ultrathin niobium nitride films grown by atomic layer deposition
3Atomic layer deposition of AlN for thin membranes using trimethylaluminum and H2/N2 plasma