Marco Diegel Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Marco Diegel returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Atomic layer deposition of AlN for thin membranes using trimethylaluminum and H2/N2 plasma
2Structural and electrical properties of ultrathin niobium nitride films grown by atomic layer deposition
3Wafer-level uniformity of atomic-layer-deposited niobium nitride thin films for quantum devices