Your search for plasma enhanced atomic layer deposition publications authored by Dmitry S. Kuzmichev returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Ferroelectric properties of full plasma-enhanced ALD TiN/La:HfO2/TiN stacks|
|2||Hydrogen radical enhanced atomic layer deposition of TaOx: saturation studies and methods for oxygen deficiency control|
|3||In Situ Control of Oxygen Vacancies in TaOx Thin Films via Plasma-Enhanced Atomic Layer Deposition for Resistive Switching Memory Applications|
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