Roland A. Fischer Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Roland A. Fischer returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Evaluation of NbN thin films grown by MOCVD and plasma-enhanced ALD for gate electrode application in high-k/SiO2 gate stacks
2Electrical and optical properties of TiO2 thin films prepared by plasma-enhanced atomic layer deposition