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The publication database currently has 1567 entries.

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In vacuo investigations on the nucleation of TaCN by plasma enhanced atomic layer deposition In vacuo studies on plasma-enhanced atomic layer deposition of cobalt thin films Influence of oxygen source on the ferroelectric properties of ALD grown Hf_1-xZr_xO₂ films

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265 Precursors and Plasma Gases

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242 Film and Plasma Characteristics

Karsten Arts Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Karsten Arts returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

Number	Title
1	Energetic ions during plasma-enhanced atomic layer deposition and their role in tailoring material properties
2	Film Conformality and Extracted Recombination Probabilities of O Atoms during Plasma-Assisted Atomic Layer Deposition of SiO₂, TiO₂, Al₂O₃, and HfO₂
3	Plasma-Assisted ALD of Highly Conductive HfN_x: On the Effect of Energetic Ions on Film Microstructure