Inductively coupled plasma sources from Plasma ALD, LLC.


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NiCoO Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing NiCoO films returned 1 record(s).

NumberTitle
1Atomic Layer Deposition of Ni-Co-O Thin-Film Electrodes for Solid-State LIBs and the Influence of Chemical Composition on Overcapacity