1,3,5-Trimethyl- 1,3,5-trivinylcyclotrisilazane, CAS# 5505-72-6

Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 1 record(s).

Number	Title
1	SiCxNy-based resistive and threshold switching by using single precursor plasma-enhanced atomic layer deposition