OMCTS, (CH3)2SiO-)4, OctaMethylCycloTetraSiloxane, CAS# 556-67-2
Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for publications using this chemistry returned 2 record(s).
| Number | Title |
|---|---|
| 1 | A PEALD Tunnel Dielectric for Three-Dimensional Non-Volatile Charge-Trapping Technology |
| 2 | Carbon content control of silicon oxycarbide film with methane containing plasma |