LaCp3, Tris(cyclopentadienyl) lanthanum, CAS# 1272-23-7
Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for publications using this chemistry returned 1 record(s).
| Number | Title |
|---|---|
| 1 | XPS study of homemade plasma enhanced atomic layer deposited La2O3/ZrO2 bilayer thin films |