[bis(1,4-di-isopropyl-1,3-diazabutadienyl)Mn(II)], CAS# 0-0-0
Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for publications using this chemistry returned 1 record(s).
| Number | Title |
|---|---|
| 1 | Atomic layer deposited self-forming Ru-Mn diffusion barrier for seedless Cu interconnects |