Y(iPrCp)3, Yttrium tris(isopropylcyclopentadienyl), CAS# 130206-63-2
Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for publications using this chemistry returned 1 record(s).
| Number | Title |
|---|---|
| 1 | Atomic layer deposition of Y2O3 thin films with a high growth per cycle by Ar multiple boost injection |