Cyclopentadienyl ethyl (dicarbonyl) Ruthenium, CpRu(CO)2Et, CAS# 0-0-0
Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for publications using this chemistry returned 2 record(s).
| Number | Title |
|---|---|
| 1 | Atomic layer deposition of Ru from CpRu(CO)2Et using O2 gas and O2 plasma |
| 2 | In situ spectroscopic ellipsometry during atomic layer deposition of Pt, Ru and Pd |