Cyclopentadienyl ethyl (dicarbonyl) Ruthenium, C_pRu(CO)₂Et, CAS# 0-0-0

Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 2 record(s).

Number	Title
1	In situ spectroscopic ellipsometry during atomic layer deposition of Pt, Ru and Pd
2	Atomic layer deposition of Ru from CpRu(CO)2Et using O2 gas and O2 plasma